Inline gas filters, Wafergard® III NF Mini and Mini XL

Supplier: ENTEGRIS
WG3NS2RR2 WG3NS2RR4 WG3NS1RR2
ENTEWG3NS2RR2EA 0 EUR
ENTEWG3NS2RR2 ENTEWG3NS2RR4 ENTEWG3NS1RR2
Inline gas filters, Wafergard® III NF Mini and Mini XL
Filters Gas Filters
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

  • Superior particulate filtration for ultrapure gas system filtration
  • Housing assembly eliminates outgassing by minimising weld area
  • Eliminates outgassing, improves corrosion resistance and provides excellent chemical compatibility

Filter element: patented, sintered nickel membrane; housing: electropolished VAR 316L stainlessMore Product Information
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SPECIFICATIONS

Material Nickel Nickel Nickel
Environmentally Preferable
Max. differential pressure Forward/reverse: 20 Forward/reverse: 20 Forward/reverse: 20
Max. operating pressure 165 bar @ 100 °C 165 bar @ 100 °C 165 bar @ 100 °C
Leak rating Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
Max. operating temperature Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar
Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar
Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar
Fitting size 1/4" gasket seal 1/2" gasket seal 1/4" gasket seal
Inlet/outlet Male/male Male/male Male/male
Ø×L 28,5×127 mm 28,5×133 mm 28,5×84 mm

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